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Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
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2011
Conference Paper
Title
Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Author(s)
Murakami, Katsuhisa
Rommel, Mathias
Yanev, Vasil
Bauer, A.J.
Frey, Lothar
Mainwork
Frontiers of Characterization and Metrology for Nanoelectronics 2011
Conference
International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2011
Open Access
DOI
10.1063/1.3657879
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Keyword(s)
dielectric thin films
grain boundary
atomic force microscopy
conductive AFM
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