2011
Poster
Title

Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy

Title Supplement
Poster at International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, May 23-26, 2011, Grenoble, France
Author(s)
Murakami, K.
Rommel, Mathias  orcid-logo
Yanev, V.
Bauer, A.J.
Frey, L.
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Keyword(s)