2010
Poster
Title

Characterization of thickness variations of thin dielectric layers at a nanoscale using Scanning Capacitance Microscopy

Title Supplement
Poster at WoDiM 2010, 16th Workshop on Dielectric Materials 2010, 28.06.-30.06.2010, Bratislava, Slovak Republic
Author(s)
Yanev, V.
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, L.
Conference
DOI
File(s)
Rights
Under Copyright
Language
English
Keyword(s)