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  4. Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale
 
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2009
Poster
Title

Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale

Title Supplement
Poster at 16th biannual conference of Insulating Films on Semiconductors (INFOS 2009), 29.06.-01.07.2009, Cambridge University, UK
Author(s)
Yanev, V.
Erlbacher, T.  
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, L.
Conference
Biannual Conference of Insulating Films on Semiconductors (INFOS) 2009  
DOI
10.24406/publica-fhg-365847
File(s)
001.pdf (1.51 MB)
Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • tunneling atomic force microscopy (TUNA)

  • conductive atomic force microscopy (c-AFM)

  • high-k dielectrics

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