Chemical and gas-phase kinetics in a CHF3 + Ar discharge

The present work deals with experimental investigation as well as modeling of radical and metastable kinetics in a trifluoromethane/argon plasma. Therefore, space- and time-resolved laser-induced fluorescence measurements of the CF and CF2 densities were carried out. For the interpretation of the observed glow and afterglow density data, the discharge was modeled from both the plasma kinetical and chemical point of view.