2008
Conference Paper
Title

Residual Stress Measurements on Semiconductor Layers Utilizing Stress Relief Techniques

Author(s)
Vogel, D.
Lehr, M.U.
Grillberger, M.
Jaschke, V.
Geisler, H.
Gollhardt, A.
Luczak, F.
Michel, B.
Mainwork
Conference
Language
English