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Nanoscale deformation measurements - concepts for failure and reliability assessment at the nanoscale
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2008
Conference Paper
Title
Nanoscale deformation measurements - concepts for failure and reliability assessment at the nanoscale
Author(s)
Michel, B.
Gollhardt, A.
Keller, J.
Mainwork
Nanotechnology 2008. NSTI Nanotechnology Conference and Trade Show. Technical proceedings. Vol.1: Materials, fabrication, particles, and characterization
Conference
Nanotechnology Conference and Trade Show (Nanotech) 2008
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
