2007
Poster
Title

Thermal stability of thin ALD ZrO2 layers as dielectrics in deep trench DRAM devices annealed in N2 and NH3

Title Supplement
Poster at E-MRS Fall Meeting, September 17-21 2007, Warsaw
Author(s)
Weinreich, W.
Lemberger, M.
Erben, E.
Heitmann, J.
Wilde, L.
Ignatova, V.A.
Teichert, S.
Schröder, U.
Oberbeck, L.
Bauer, A.J.
Ryssel, H.
Kücher, P.
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English