Characterization of CVD diamond surfaces by means of stereoscopic SEM pictures and confocal laser scanning mircroscopy

For the three-dimensional (3D) measurement of microstructures, many existing measuring methods have restrictions in the assessment of micro features with a lateral size of two micrometer and below. Results are being presented of using two new methods: 3D-modeling of the surface topography by means of stereoscopic scanning electron microscope (SEM) images and confocal laser scanning microscopy. The application example is the measuring of rough, microcrystalline diamond layers, deposited by chemical vapour deposition (CVD).