Development of a dynamic linear axis for machining of groove structures

The paper presents the development of a linear axis that combines the properties of an ultra-precision axis and an axis with extremely high dynamic. For the realisation of high stiffness and good damping characteristics hydrostatic guideways are used. However, the dominated feature of the linear axis is the design of a mass decoupling system that allows the reduction of the prefaced machine base forces of more than 60 %. With this, a very high dynamic and also precise movement can be realised. The developed axis allows the machining of planar groove structures by planing faster than fly-cutting, with the same lateral straightness quality and surface roughness.