English
Deutsch
Log In
Email address
Password
Log in
or
Log in with Shibboleth
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Extended damping model for out-of-plane-comb driven micromirrors
Details
Full
Export
Statistics
Options
2006
Konferenzbeitrag
Titel
Extended damping model for out-of-plane-comb driven micromirrors
Author(s)
Klose, T.
Sandner, T.
Schenk, H.
Lakner, H.
Hauptwerk
MOEMS display, imaging, and miniaturized microsystems IV
Konferenz
Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006
Language
Englisch
google-scholar
View Details
IPMS
Tags
MEMS
scanning micromirror
comb drive
damping