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  4. Extended damping model for out-of-plane-comb driven micromirrors
 
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2006
  • Konferenzbeitrag

Titel

Extended damping model for out-of-plane-comb driven micromirrors

Author(s)
Klose, T.
Sandner, T.
Schenk, H.
Lakner, H.
Hauptwerk
MOEMS display, imaging, and miniaturized microsystems IV
Konferenz
Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006
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Language
Englisch
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IPMS
Tags
  • MEMS

  • scanning micromirror

  • comb drive

  • damping

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