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  4. Pulse duration and energy density influence on laser processing of metals with short and ultrashort pulses
 
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2005
Conference Paper
Title

Pulse duration and energy density influence on laser processing of metals with short and ultrashort pulses

Author(s)
Harzic, Ronan Le
Fraunhofer-Institut für Biomedizinische Technik IBMT  
Breitling, D.
Sommer, S.
Fohl, C.
Valette, S.
König, K.
Dausinger, F.
Audouard, E.
Mainwork
Photon processing in microelectronics and photonics IV  
Conference
Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing  
DOI
10.1117/12.587540
Language
English
Fraunhofer-Institut für Biomedizinische Technik IBMT  
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