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Time-resolved and spectrally resolved 5D multiphoton microscopy for analysis and nanoprocessing of materials
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2005
Conference Paper
Title
Time-resolved and spectrally resolved 5D multiphoton microscopy for analysis and nanoprocessing of materials
Author(s)
König, K.
Riemann, I.
Schuck, H.
Sauer, D.
Velten, T.
Harzic, Ronan Le
Fraunhofer-Institut für Biomedizinische Technik IBMT
Mainwork
Photon processing in microelectronics and photonics IV
Conference
Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing
DOI
10.1117/12.590400
Language
English
Fraunhofer-Institut für Biomedizinische Technik IBMT
