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Unit process aspects for APC-software implementation
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2005
Conference Paper
Title
Unit process aspects for APC-software implementation
Author(s)
Roeder, G.
Schellenberger, M.
Pfitzner, L.
Ryssel, H.
Spitzlsperger, G.
Mainwork
6th European AEC/APC Conference Dublin 2005. CD-ROM
Conference
European Advanced Equipment Control / Advanced Process Control Conference (AEC/APC Europe) 2005
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Keyword(s)
APC
unit process