2003
Conference Paper
Title

Spectrophotometry in the vacuum-UV

Abstract
We report on our investigations of spectrophotometric measurements in the vacuum UV. A commercially available VUV setup at Fraunhofer IOF is used to illustrate spectrally and angle-resolved reflection and transmission measurements together with an in-situ sample irradiation by a F2-excimer laser.
Author(s)
Heber, J.
Gatto, A.
Kaiser, N.
Mainwork
Conference
DOI
Language
English
Keyword(s)