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  4. 3D system integration technologies
 
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2003
Conference Paper
Title

3D system integration technologies

Author(s)
Ramm, P.
Klumpp, A.
Merkel, R.
Weber, J.
Wieland, R.
Ostmann, A.
Wolf, J.
Mainwork
Materials, technology and reliability for advanced interconnects and low-k dielectrics  
Conference
Symposium E: "Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics" 2003  
Materials Research Society (Spring Meeting) 2003  
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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