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Influence of the frequency on fatique of directly wafer-bonded silicon
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2002
Conference Paper
Title
Influence of the frequency on fatique of directly wafer-bonded silicon
Author(s)
Bagdahn, J.
Fraunhofer-Institut für Werkstoffmechanik IWM
Bernasch, M.
Petzold, M.
Mainwork
Fatigue 2002. Proceedings of the Eighth International Fatigue Congress
Conference
International Fatigue Congress 2002
Language
English
Fraunhofer-Institut für Werkstoffmechanik IWM
