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  4. Deposition of titanium dioxide by high-rate, ion-assisted electron beam evaporation
 
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2002
  • Konferenzbeitrag

Titel

Deposition of titanium dioxide by high-rate, ion-assisted electron beam evaporation

Author(s)
Schiller, N.
Krug, M.
Straach, S.
Neumann, M.
Hauptwerk
Society of Vacuum Coaters. 45th Annual Technical Conference 2002. Proceedings
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 2002
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Englisch
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