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Laser activation of AIN surfaces for generation of electrically conductive structures
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2002
Conference Paper
Title
Laser activation of AIN surfaces for generation of electrically conductive structures
Author(s)
Körber, K.
Tönshoff, H.K.
Dieckhoff, S.
Mainwork
Materials Week 2001. Proceedings. CD-ROM
Conference
Werkstoffwoche 2001
Language
English
Fraunhofer-Institut für Fertigungstechnik und Angewandte Materialforschung IFAM