English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Fracture strength of polysilicon thin films at stress concentration
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2002
Conference Paper
Title
Fracture strength of polysilicon thin films at stress concentration
Author(s)
Bagdahn, J.
Sharpe, W.N.
Mainwork
Materials science of microelectromechanical systems (MEMS) devices IV
Conference
Materials Research Society (Fall Meeting) 2001
Language
English
Fraunhofer-Institut für Werkstoffmechanik IWM
