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  4. A new approach for handling and transferring of thin semiconductor materials
 
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2001
Conference Paper
Title

A new approach for handling and transferring of thin semiconductor materials

Author(s)
Bagdahn, J.
Katzer, D.
Petzold, M.
Wiemer, M.
Alexe, M.
Dragoi, V.
Gösele, U.
Mainwork
Micro System Technologies 2001  
Conference
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 2001  
Language
English
Fraunhofer-Institut für Werkstoffmechanik IWM  
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