2001
Conference Paper
Title

Large area patterning of high-density interconnects by novel UV-excimer lithography and photo patternable ORMOCERTM-dielectrica

Author(s)
Robertsson, M.
Haglund, J.
Johansson, C.
Gibaud, P.
Lambert, D.
Popall, M.
Fröhlich, L.
Tolvgard, A.
Alping, A.
Linden, L.
Rodekirch, J.
Zemel, M.I.
Nunes, C.C.
Mainwork
Conference
Language
English