2001
Conference Paper
Title

Effect of copper on the breakthrough voltage of Poly-Si - Poly-Si capacitors

Author(s)
Boehringer, M.
Pillion, J.E.
Erdmann, V.
Rygula, M.
Winz, K.
Brauchle, P.
Aquino, D.
Zhang, H.
Zahka, J.
Zielonka, G.
Hauber, J.
Mainwork
Conference
Language
English