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Pneumatic silicon microvalves with piezoelectric actuation
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2000
Conference Paper
Title
Pneumatic silicon microvalves with piezoelectric actuation
Author(s)
Weinmann, M.
Post, P.
Vollmer, H.
Wanner, R.
Kluge, S.
Woias, P.
Mainwork
Actuator 2000. 7th International Conference on New Actuators and International Exhibition on Smart Actuators and Drive Systems. Conference proceedings
Conference
International Conference on New Actuators 2000
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
