English
Deutsch
Log In
Email address
Password
Log in
or
Log in with Shibboleth
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
A novel flow sensor with high time resolution based on differential pressure principle
Details
Full
Export
Statistics
Options
1999
Konferenzbeitrag
Titel
A novel flow sensor with high time resolution based on differential pressure principle
Author(s)
Richter, M.
Wackerle, L.
Woias, P.
Hillerich, B.
Hauptwerk
MEMS '99, Twelfth IEEE International Conference on Micro Electro Mechanical Systems. Technical digest
Konferenz
International Conference on Micro Electro Mechanical Systems (MEMS)
DOI
10.1109/MEMSYS.1999.746783
Language
Englisch
google-scholar
View Details
IMS
