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On the static and dynamic behaviour of an electrostatically movable plate actuator
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1998
Konferenzbeitrag
Titel
On the static and dynamic behaviour of an electrostatically movable plate actuator
Author(s)
Kluge, S.
Klink, G.
Biller, M.
Hillerich, B.
Woias, P.
Hauptwerk
Actuator 98. Conference proceedings
Konferenz
International Conference on New Actuators 1998
Language
Englisch
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