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High resolution TEM investigations of nanostructures in hard amorphous carbon films
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1998
Conference Paper
Title
High resolution TEM investigations of nanostructures in hard amorphous carbon films
Author(s)
Banzhof, H.
Lichte, H.
Luft, A.
Meyer, C.F.
Scheibe, H.J.
Schultrich, B.
Ziegele, H.
Mainwork
Trends and new applications of thin films. Proceedings of the 6th International Symposium
Conference
International Symposium on Trends and New Applications in Thin Films (TATF) 1998
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS
Keyword(s)
Kohlenstoff-Schichten
Struktur
Keramik
Kohlenstoff
Multischicht
Nanomaterialien
Grenzfläche