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  4. High resolution TEM investigations of nanostructures in hard amorphous carbon films
 
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1998
Conference Paper
Title

High resolution TEM investigations of nanostructures in hard amorphous carbon films

Author(s)
Banzhof, H.
Lichte, H.
Luft, A.
Meyer, C.F.
Scheibe, H.J.
Schultrich, B.
Ziegele, H.
Mainwork
Trends and new applications of thin films. Proceedings of the 6th International Symposium  
Conference
International Symposium on Trends and New Applications in Thin Films (TATF) 1998  
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • Kohlenstoff-Schichten

  • Struktur

  • Keramik

  • Kohlenstoff

  • Multischicht

  • Nanomaterialien

  • Grenzfläche

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