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Preparation of amorphous and nanocrystalline tetrahedral carbon by fullerene plasma deposition
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1997
Conference Paper
Title
Preparation of amorphous and nanocrystalline tetrahedral carbon by fullerene plasma deposition
Author(s)
Brauneck, U.
David, H.-W.
Diekhoff, S.
Busmann, H.G.
Mainwork
Micro Materials. Micro Mat '97. Proceedings
Conference
Micro Materials (Micro Mat) 1997
Language
English
Fraunhofer-Institut für Fertigungstechnik und Angewandte Materialforschung IFAM