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Energy and particle fluxes in PLD processes
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1997
Conference Paper
Title
Energy and particle fluxes in PLD processes
Author(s)
Lenk, A.
Schultrich, B.
Witke, T.
Weiß, H.-J.
Mainwork
Laser processing of surfaces and thin films. Proceedings of Symposium H on Laser Processing of Surfaces and Thin Films of the 1996 E-MRS Spring Conference
Conference
Symposium on Laser Processing of Surfaces and Thin Films 1996
European Materials Research Society (Spring Meeting) 1996
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS
Keyword(s)
Plasma-Diagnostik
PLD
Faserbeschichtung
Laser-Verfahren
Laserchemie
