1995
Conference Paper
Title

Statistical accuracy and CPU-time characteristic of three trajectory split methods for Monte-Carlo simulation of ion implantation

Author(s)
Bohmayr, W.
Burenkov, A.  
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Lorenz, J.  
Ryssel, H.
Selberherr, S.
Mainwork
Conference
Language
English