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Advances in pulsed plasma technology (PMS-Process)
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1994
Conference Paper
Titel
Advances in pulsed plasma technology (PMS-Process)
Author(s)
Schiller, S.
Goedicke, K.
Reschke, J.
Hauptwerk
8th International Conference on Vacuum Web Coating
Konferenz
International Conference on Vacuum Web Coating 1994
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
