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SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 1
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1992
Conference Paper
Titel
SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 1
Author(s)
Dura, H.-G.
Gassel, H.
Mokwa, W.
Vogt, H.
Hauptwerk
Electrochemical Society Meeting '92. Extended Abstracts
Konferenz
Electrochemical Society (Meeting) 1992
Language
English
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Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Tags
Ätzen
buried oxide
epitaxial layer
Epitaxialschicht
etch stop
etching
Membran
Membranes
SIMOX
