With the increasing use of high-power lasers, especially Co2 lasers, in the field of industrial laser-materials processing numerous application occur, in which diagnostics of laser-beam characteristics may help to maintain or to increase processing quality and reproducibility as well as system reliability. Three different types of diagnostic devices are presented, developed to monitor the total laser power, the intensity distribution of unfocused as well as focused beams, and the beam position. The practical use of these systems is discussed with some examples typical for the industrial applications of high-power-lasers.
