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Patent
Title

Aufreinigung eines Tiegels für eine Halbleiterverarbeitung

Other Title
Cleaning a crucible, preferably silicon crucible for processing semiconductor materials, comprises e.g. melting contaminated crucible with a semiconductor material such that impurities from crucible are included by semiconductor material
Abstract
Cleaning a crucible (12) for processing semiconductor materials, comprises (a) filling (14) the contaminated crucible with a semiconductor material (16), (b) melting the semiconductor material in the contaminated crucible such that impurities (18) from the contaminated crucible are included by the semiconductor material (16'), and (c) removing the semiconductor material with the included-impurities. An independent claim is also included for manufacturing the crucible, comprising carrying out primary forming of the crucible, and carrying out the above mentioned method.
Inventor(s)
Schneider, Veronika
Reimann, Christian  
Friedrich, J.  
Link to Espacenet
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=102012201116A1
Patent Number
102012201116
Publication Date
2012
Language
German
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
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