Mikromechanisches Bauelement zur Modulation von elektromagnetischer Strahlung

(A1) Ein mikromechanisches Bauelement mit einem Substrat, das so strukturiert ist, dass in demselben eine Platte gebildet ist, die lateral auslenkbar ist und lateral strahlungsmodulierend wirkt, weist eine Einrichtung zum lateralen Auslenken der Platte auf.

DE 102007047010 A1 UPAB: 20090509 NOVELTY - The micromechanical component (100) has a substrate, which is structured such that a plate (1) is formed in the substrate, which is laterally deflected and has laterally radiation modulating effect. A unit is provided for lateral deflection (12) of the plate. The modulation structure has an aperiodic structure or is defined by a Hadamard or a simplex matrix. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an optical system comprises one or more micromechanical components. USE - Micromechanical component for modulation of electromagnetic radiation for an optical system (Claimed). ADVANTAGE - The substrate is structured such that a plate is formed in the substrate, which is laterally deflected and has laterally radiation modulating effect, and thus enables an economical manufacturing of the micromechanical component.