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Patent
Title
Schaltungsanordnung zur Stromversorgung fuer gepulst betriebene Vakuumboegen
Other Title
Circuit arrangement for the power supply of vacuum arcs operated in pulsed mode
Abstract
The invention relates to a circuit arrangement for the power supply for vacuum arcs operated in pulsed mode. Objects to which the invention refers are vacuum arcs operated in pulsed mode which are used, for example, as the plasma source in coating technology and for the mass-spectroscopic analysis of conductive samples. In the circuit arrangement for the power supply for vacuum arcs operated in pulsed mode according to the invention, a diode is arranged in parallel to the discharge gap in such a way that the cathode of the diode is connected to the arc anode and the anode of the diode is connected to the arc cathode.
Inventor(s)
Scheibe, H.J.
Uhlemann, H.J.
Siemroth, P.
Link to:
Patent Number
1990-4037388
Publication Date
2000
Language
German