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  4. Herstellungverfahren für dreidimensional geformte Metallprofile und Anwendung des Verfahrens zur Herstellung von Metallprofilen für die Mikromechanik
 
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Patent
Title

Herstellungverfahren für dreidimensional geformte Metallprofile und Anwendung des Verfahrens zur Herstellung von Metallprofilen für die Mikromechanik

Other Title
Production of inclined galvanic structures - with the substrate provided beforehand with an electrically conductive plating base structured in lateral directions.
Abstract
The method concerns production of a galvanically precipitated structure (20a) - which is shaped in the height direction [h(x, y)] - on a substrate provided beforehand with an electrically conductive plating base (11) structured in lateral directions (x, y). USE - For production of three-dimensional galvanic structures on substrates. ADVANTAGE - It is possible to produce arbitrarily shaped galvanic structures whose edge surfaces need not be vertical.
Inventor(s)
Maciossek, A.
Link to:
Espacenet
Patent Number
1996-19604242
Publication Date
1999
Language
German
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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