Auflagevorrichtung fuer ein zu beschichtendes Substrat sowie Verfahren zur vollstaendigen Beschichtung eines Substrates unter Verwendung der Vorrichtung
The support for a substrate to be coated in a gas-tight closable chamber incorporates at least one first support unit contacting parts of the substrate during coating. The support is characterized by the presence of a further support unit which is movable relative to the first support unit and contacts the substrate in such a way that the latter can be lifted from the first support unit. The contact regions between the substrate and the first support unit differ from those between the substrate and the second support unit. Also claimed is a method for using such a support for complete coating of a substrate in which the substrate lying on the first support unit is coated. During the coating process the substrate is contacted by the second support unit at points already coated, and is lifted from the first support unit. USE - In substrate coating installations, for example. ADVANTAGE - Complete coating of substrates is made possible.
DE 1997-19712320 A: 19970324