Interferometrisches Messverfahren sowie fuer seine Durchfuehrung geeignete Laserinterferometeranordnung
In known interferometers, mode-jump-free tunable semiconductor lasers are used increasingly. However, they have the disadvantage that the resonance wavelength heavily depends on the operating parameters. The task of the present invention is therefore to implement an interferometric measuring process and a laser interferometer arrangement suitable for its implementation in order to effectively avoid this dependence - compared with the state of the art - even if the operating conditions change drastically. The task of the invention is solved by at least two control interferometers (2, 3) graduated in cascades in relation to each other with relation to the control section (28, 37), and that, if a suitable signal threshold (46a, 47b, 46b, 47a) is exceeded or undershot, switchover takes place to the next successive control interferometer with the shorter or longer control section. The invention is suitable in particular for use in laser interferometers with laser sources whose wavelengths a re controllable in order to keep the air wavelength constant during interferometric measurements, for example in position measurements on CNC machine tools, for measuring the straightness of guideways or machine axes or by high-precision interferometric angle measurements.
DE 1992-4230748 A: 19920914