Piezo actuators are used for example in so-called fast tool servo systems with which tools can be fed at high frequency. The disadvantage here is the heat loss occurring in the piezo element increasing with rising frequency. Thus, the maximum feed frequency of such piezo actuators is limited. In order to permit high feed frequencies with the piezo actuator, the temperature of the piezo element is adapted to the ambient temperature of the piezo element. As a result of this thermal stabilization of the piezo element, the piezo element is not subjected to an impermissibly high heating. The heat loss occurring in the piezo element is maintained using this post-regulation so that the piezo element and its environment have the same temperature. The piezo actuator can be used for the production of highly precise laser optics, as a precision positioning system for the submicrometer range, for the compensation of geometry errors and/or of thermal errors on machine tools, for active vibration da mping or as an exciter.
DE 1991-4113667 A: 19910426