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Development and Characterization of Transition Metal Silicides for Metallization Application
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2020
Master Thesis
Title
Development and Characterization of Transition Metal Silicides for Metallization Application
Thesis Note
Freiburg, Univ., Master Thesis, 2020
Author(s)
Hamtaei, Sarallah
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Person Involved
Sorgenfrei, Tina
Fiederle, Michael
Publishing Place
Freiburg
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
