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  4. Atomic layer deposition of zinc based transparent conductive oxides
 
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2017
Doctoral Thesis
Titel

Atomic layer deposition of zinc based transparent conductive oxides

Abstract
In this work Atomic Layer deposition of niobium and titanium doped ZnO based Transparent Conductive Oxide (TCO) coatings were developed. The fundamentals required for the deposition and doping of ZnO TCOs are discussed. The various opto-electronic properties of the niobium and titanium doped ZnO films were determined and compared. A model was proposed to explain the various changes in the opto-electronic properties of these films.
ThesisNote
Zugl.: Braunschweig, TU, Diss., 2016
Author(s)
Gurram, Sanjeev Kumar
Verlag
Fraunhofer Verlag
Verlagsort
Stuttgart
DOI
10.24406/publica-fhg-281296
File(s)
N-432032.pdf (11.59 MB)
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
Tags
  • nanotechnology

  • industrial chemistry ...

  • testing of materials

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