Accuracy in force estimation applied on a piezoelectric fine positioning system for machine tools

In order to improve the accuracy of machine tools, the use of additional active modules meeting the requirements of the ""Plug & Produce"" approach is focused. In this context one approach is the installation of a high precision positioning table for online compensation of machine tool deflections. For the model-based determination of the deflection, the knowledge of the effecting process force is crucial. This article examines the use of displacement sensors for force estimation in a piezoelectric system. The method is implemented on a high precision positioning table applicable in milling machine tools. In order to compensate nonlinear effects of piezoelectric actuators, a hysteresis operator is implemented. Experimental investigations are carried out to quantify the influence of preload stiffness, preload force and workpiece weight. Finally, a resolution d < 78 N could be achieved and further improvements to meet the requirements for online compensation of machine tool deflection are discussed.