Atmospheric Pressure Dielectric Barrier Discharge Plasma-Enhanced Optical Contact Bonding of Coated Glass Surfaces
This paper reports on plasma-enhanced bonding of optics surfaces coated with highly sensitive functional layers using surface preparation by a dielectric barrier discharge (DBD) plasma. The samples to be bonded were treated with a DBD in diffuse mode at atmospheric pressure for 30 s which is applied directly to the sample surface, then joined with the aid of de-ionised water and cured subsequently. The plasma treatment itself already increased the shear strength achieved by a factor of two compared to classical wringing or direct contacting, while the curing process led to a further increase by a factor of up to five, depending on curing temperature. The observed enhancement of shear strength can be attributed to DBD plasma-induced cleaning and most likely additional activation of the surface as verified by contact angle measurements. Since the impact of the used plasma on the surface is quite gentle in comparison to other bonding processes or other plasma-based processes reported in the literature, a destruction of the treated functional layer is avoided. This advantage makes it possible to bond even optics surfaces coated with sensitive materials.
Faculty of Engineering and Health, University of Applied Sciences and Arts; Thin Films IST-Application Center for Plasma and Photonics, Fraunhofer-Institut für Schicht- und Oberflächentechnik IST