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  4. Analytical determination of the complex refractive index and the incident angle of an optically isotropic substrate by ellipsometric parameters and reflectance
 
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2021
Journal Article
Title

Analytical determination of the complex refractive index and the incident angle of an optically isotropic substrate by ellipsometric parameters and reflectance

Abstract
An analytical solution for the determination of both angle of incidence (AOI) and the complex refractive index from combined ellipsometric and reflectometric measurements at optically isotropic substrates is presented. Conventional ellipsometers usually measure flat surfaces because the curvatures of the surface alter the reflected or transmitted light, which causes experimental errors due to the deviation of the incident angle. However, in real industrial applications, the shapes of samples are usually curved or even free-form. In this case, the knowledge of the AOI is essential. The proposed method provides a simple way to measure the AOI and the complex refractive index of nonplanar samples without extra or complicated hardware.
Author(s)
Chen, Chia-Wei
Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB  
Hartrumpf, Matthias  
Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB  
Längle, Thomas  
Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB  
Beyerer, Jürgen  
Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB  
Journal
Applied optics  
DOI
10.1364/AO.423793
Language
English
Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB  
Keyword(s)
  • analytical determination

  • angle of incidence

  • complex refractive index

  • ellipsometric parameters

  • experimental errors

  • incident angle

  • isotropic substrates

  • transmitted light

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