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2018
Journal Article
Title
Calibration sample for arbitrary metrological characteristics of optical topography measuring instruments
Abstract
Areal optical surface topography measurement is an emerging technology for industrial quality control. However, neither calibration procedures nor the utilization of material measures are standardized. State of the art is the calibration of a set of metrological characteristics with multiple calibration samples (material measures). Here, we propose a new calibration sample (artefact) capable of providing the entire set of relevant metrological characteristics within only one single sample. Our calibration artefact features multiple material measures and is manufactured with two-photon laser lithography (direct laser writing, DLW). This enables a holistic calibration of areal topography measuring instruments with only one series of measurements and without changing the sample.
Author(s)
Eifler, M.
Institute for Measurement and Sensor Technology, University of Kaiserslautern, Gottlieb Daimler Straße 44, 67663 Kaiserslautern, Germany
Hering, J.
Physics Department and Research Center OPTIMAS, University of Kaiserslautern, Erwin- Schrödinger-Str. 56, 67663 Kaiserslautern, Germany
Freymann, G. von
Physics Department and Research Center OPTIMAS, University of Kaiserslautern, Erwin- Schrödinger-Str. 56, 67663 Kaiserslautern, Germany, and Fraunhofer Institute for Industrial Mathematics ITWM, Fraunhofer Platz 1, 67663 Kaiserslautern, Germany