Development of a novel high reliable Si-based trace humidity sensor array for aerospace and process industry

In this paper we present high reliable and accurate silicon-based trace humidity sensors for use in aerospace and process industry. The sensors have been realized by using simple MEMS technology in this work. One is a single sensor (sensor cell) for monitoring of humidity, and sensor array is able to measure the total trace humidity in the atmosphere. It's very suitable for aerospace and process industry such pharmacy applications.