Optofluidic sensor system with Ge PIN photodetector for CMOS-compatible sensing

Vertical optofluidic biosensors based on refractive index sensing promise highest sensitivities at smallest area footprint. Nevertheless, when it comes to large-scale fabrication and application of such sensors, cheap and robust platforms for sample preparation and supply are needed-not to mention the expected ease of use in application. We present an optofluidic sensor system using a cyclic olefin copolymer microfluidic chip as carrier and feeding supply for a complementary metal-oxide-semiconductor compatibly fabricated Ge PIN photodetector. Whereas typically only passive components of a sensor are located within the microfluidic channel, here the active device is directly exposed to the fluid, enabling top-illumination. The capability for detecting different refractive indices was verified by different fluids with subsequent recording of the optical responsivity. All components excel in their capability to be transferred to large-scale fabrication and further integration of microfluidic and sensing systems. The photodetector itself is intended to serve as a platform for further sophisticated collinear sensing approaches.