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  4. Switching kinetics in nanoscale hafnium oxide based ferroelectric field-effect transistors
 
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2017
  • Zeitschriftenaufsatz

Titel

Switching kinetics in nanoscale hafnium oxide based ferroelectric field-effect transistors

Abstract
The recent discovery of ferroelectricity in thin hafnium oxide films has led to a resurgence of interest in ferroelectric memory devices. Although both experimental and theoretical studies on this new ferroelectric system have been undertaken, much remains to be unveiled regarding its domain landscape and switching kinetics. Here we demonstrate that the switching of single domains can be directly observed in ultrascaled ferroelectric field effect transistors. Using models of ferroelectric domain nucleation we explain the time, field and temperature dependence of polarization reversal. A simple stochastic model is proposed as well, relating nucleation processes to the observed statistical switching behavior. Our results suggest novel opportunities for hafnium oxide based ferroelectrics in nonvolatile memory devices.
Author(s)
Mulaosmanovic, Halid
NaMLab gGmbH Dresden
Ocker, Johannes
NaMLab gGmbH Dresden
Müller, Stefan
NaMLab gGmbH Dresden
Schroeder, Uwe
NaMLab gGmbH Dresden
Müller, Johannes
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Polakowski, Patrick
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Flachowsky, Stefan
Globalfoundries Dresden
Bentum, Ralf van
Globalfoundries Dresden
Mikolajick, Thomas
NaMLab gGmbH Dresden / TU Dresden
Slesazeck, Stefan
NaMLab gGmbH Dresden
Zeitschrift
ACS applied materials & interfaces
Thumbnail Image
DOI
10.1021/acsami.6b13866
Language
Englisch
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