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  4. Fast co-diffusion process for bifacial n-type solar cells
 
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2017
Journal Article
Title

Fast co-diffusion process for bifacial n-type solar cells

Abstract
We present a new simplified and fast process sequence for the fabrication of large area bifacial n-type silicon solar cells. A co-diffusion process simultaneously forms the boron-doped emitter and the phosphorus-doped back surface field in one single high temperature step. We use borosilicate glasses (BSG) deposited by atmospheric pressure chemical vapor deposition (APCVD) and a POCl3 gas ambient as doping sources. Tailoring of the diffusion process yields a reduced co-diffusion process time of 114 min, well suited for production. The presented co-diffusion process allows a lean fabrication process. A proof of concept experiment leads to 20.1% bifacial n-type solar cells.
Author(s)
Meier, S.
Maier, Stefan
Demberger, Carsten
Wolf, Andreas  
Biro, Daniel  
Glunz, Stefan W.  
Journal
Solar RRL  
DOI
10.1002/solr.201600005
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE  
Keyword(s)
  • PV Produktionstechnologie und Qualitätssicherung

  • Photovoltaik

  • Silicium-Photovoltaik

  • Dotierung und Diffusion

  • Pilotherstellung von industrienahen Solarzellen

  • APCVD

  • boron-doping

  • BSG

  • PERT

  • Co-Diffusion

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